Краткие технические характеристики:

  • Captures new defect classes

Назначение: оборудование предназначено для высокоскоростного измерения параметров топологии, наличия дефектов, их размеров и концентрации, а также для определения качества наложения фотошаблона на пластину.

Область применения: установки измерения топологии фотошаблонов KLA-Tencor Archer предназначены для автоматического измерения топологии поверхности фотошаблонов, используемых при производстве изделий микроэлектронной техники.

Описание оборудования

The KLA-Tencor 300 UV Series was the first reticle inspection family using UV illumination for the inspection of DUV reticles. With the higher resolution UV wavelength and new defect detection technology, the 300UV reticle inspection systems can inspect reticles with advanced design rules, critical OPC structures, and many phase shift types, all common elements of advanced integrated circuit technology.

The UV wavelength reticle inspection systems are built on KLA-Tencor’s field-proven 300 Series reticle inspection platform, adding advanced UV optics, defect detection algorithms, and review tools. Whether providing die-to-die, die-to-database, or KLA-Tencor’s patented STARlightTM contamination inspection, the 300UV Series of reticle inspection system enables the industry’s highest quality of advanced reticles.

  • Captures new defect classes

The KLA-Tencor 300 UV Series was the first reticle inspection family using UV illumination for the inspection of DUV reticles. With the higher resolution UV wavelength and new defect detection technology, the 300UV reticle inspection systems can inspect reticles with advanced design rules, critical OPC structures, and many phase shift types, all common elements of advanced integrated circuit technology.

The UV wavelength reticle inspection systems are built on KLA-Tencor’s field-proven 300 Series reticle inspection platform, adding advanced UV optics, defect detection algorithms, and review tools. Whether providing die-to-die, die-to-database, or KLA-Tencor’s patented STARlightTM contamination inspection, the 300UV Series of reticle inspection system enables the industry’s highest quality of advanced reticles.

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